%A Ariswan Ariswan %X CdTe polycrystalline thin films had been fabricated using vacuum evaporation technique. Their properties had been investigated using X-ray diffraction, energy dispersive spectroscopy (EDS), scanning electron microscope (SEM) and uv-vis spectroscopy. The results showed that the CdTe thin films crystalized at hexagonal structure with lattice parameters a = 6.45 Å and c =7.66 Å. The EDS results showed that the chemical composition was non stoichiometry, slightly rich of Tellerium with Cd/Te of 0.9. It had a uniform shape with color homogenity and an optical band gap at room temperature about 1.47eV. %K Vacuum evaporation, polycrystalline, cadmium telluride, thin films %L UNY63918 %R 10.4028/www.scientific.net/AMR.1101.134 %P 497-501 %J Advanced Materials Research %D 2014 %I Trans Tech Publications %T Structural, Chemical Composition and Optical Properties of CdTe Fabricated by Vacuum Evaporation Technique %V 896