?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Esmar%2C+Budi&rft.aulast=Esmar&rft.aufirst=Budi&rft.date=May+2014&rft.atitle=MODELING+OF+REACTIVE+MAGNETRON+SPUTTERING+IN+TIALN+FILM+DEPOSITION%3A+ANALYSIS+OF+PUMPSPEED+AND+TARGET+CURRENT+EFFECT&rft.title=Proceeding+of+International+Conference+On+Research%2C+Implementation+And+Education+Of+Mathematics+And+Sciences+2014&rft.genre=article